HoLiSTEP has assembled a strong consortium comprising academia and industry leaders across 6 European countries:
Fraunhofer ENAS
Fraunhofer ENAS is coordinator of this Innovation Action. They will collect industry requirements, working parameters, and process requirements. Mask parameters for diffraction models will be provided, HMs characterised, and photoresist models developed. ENAS will implement the industrial prototype in the cleanroom, and subsequently produce and characterise structures and wafers. Post-HL processes will be developed.
SWHL GmbH
SWHL GmbH is a Swiss start-up company that has invented the HL technology and possesses all know-how and expertise for mathematical algorithms, mask computation, optical system design and further technology development. They already have a 388nm laser that will be used to build a 388nm testbench before the components with 345nm wavelengths become available.
Ekspla
Ekspla is a laser manufacturer that will develop control electronics for the seed laser and a third harmonics module. They will evaluate spatial and temporal coherence measurements, develop a laser control system and ultimately integrate all laser subunits into a complete laser system.
Ampliconyx Oy
Ampliconyx Oy specialises in the production of tapered double-clad fiber (T-DCF) amplifiers, and will develop one for the seed laser used in the HL stepper. Together with Ekspla, they will evaluate the third harmonics module and full laser system build.
Tampere University
Tampere University’s “Advanced coherent sources” group will design and characterize the seed lasers, test T-DCF amplifiers and evaluate the third harmonic module system. They will develop a measurement set-up for spatial and temporal coherence length and perform the final measurements for the complete laser system.
OKO Tech
OKO Tech (Flexible Optical B.V.) will develop an alignment system and a wavefront correction system. The alignment system involves definition of aerial alignment mark, characterisation of HMs in the optical test set-up, design of optical parts and development of software for the alignment sensor. For the wavefront correction system, deformable mirror coatings will be developed, and assistance provided for integration of the adaptive optics system in the stepper control loop.
Mimotec Sa
Mimotec Sa is a leading manufacturer of 3D micro-components. They will provide industrial requirements for lithography and post-lithography manufacturing processes, and design structures to be manufactured during the project.
Capgemini Engineering
Capgemini Engineering will perform a full life cycle assessment and life cycle costing during the project. This will feed into recommendations to further improve the processes and also guide exploitation of the developed HL stepper.
MODUS Research and Innovation
MODUS Research and Innovation will coordinate dissemination and communication activities, support IP monitoring and innovation management, facilitate the development of training materials and implement webinars.
