HoLiSTEP has assembled a strong consortium comprising many industry leaders.
HoLiSTEP will empower a positive transformative effect on environment, economy and society by enabling a wider range of companies to produce novel high-resolution 2D and 3D images at lower costs.
Publications
Learn about the aims and objectives of the HoLiSTEP project through its publications.
About
Sub-Wavelength Holographic Lithography Stepper for Integrated Circuit Production
HoLiSTEP aims to demonstrate the potential of sub-wavelength holographic lithography (SWHL) as a disruptive technology for high-resolution 2D and 3D semiconductor and micro component devices manufacturing. SWHL has the potential to overcome limitations of projection lithography and enables:
- Unique capability to produce high-resolution 3D structures in one single exposure
- Significant cost reduction for photomasks and equipment production
- Infinite lifetime of holographic photo-masks
- Applicability across all technology nodes
- The realisation of maskless lithography
the HoLiSTEP consortium will build and demonstrate an industrial prototype for the holographic stepper operating at a wavelength of 345nm (HS-345).
