HoLiSTEP aims to demonstrate the potential of sub-wavelength holographic lithography (SWHL) as a disruptive technology for high-resolution 2D and 3D semiconductor and micro component devices manufacturing. SWHL has the potential to overcome limitations of projection lithography and enables:
Sub-Wavelength Holographic Lithography Stepper for Integrated Circuit Production
- Unique capability to produce high-resolution 3D structures in one single exposure
- Significant cost reduction for photomasks and equipment production
- Infinite lifetime of holographic photo-masks
- Applicability across all technology nodes
- The realisation of maskless lithography
Consortium Partners
HoLiSTEP has assembled a strong consortium comprising many industry leaders.
HoLiSTEP will empower a positive transformative effect on environment, economy and society by enabling a wider range of companies to produce novel high-resolution 2D and 3D images at lower costs.
Publications
Learn about the aims and objectives of the HoLiSTEP project through its publications.
About
During the project
the HoLiSTEP consortium will build and demonstrate an industrial prototype for the holographic stepper operating at a wavelength of 345nm (HS-345).
